SiH4

Silane · Silicon tetrahydride

Silane is a stable, insulating silicon hydride gas widely used as a precursor for depositing high-purity silicon in semiconductor and battery technology.

Crystal structure of SiH4
Ground-state structure · Materials Project
Overview

About Silane

Silane is a gaseous silicon hydride that serves as a fundamental building block in materials science. As a wide-band-gap insulator, it is highly valued for its role in chemical vapor deposition processes used to create high-purity silicon films and nanostructures.

Its thermodynamic stability ensures its reliability as a precursor in industrial synthesis. Beyond its role in electronics, it is increasingly studied within the context of silicon-based anode materials, where it acts as a critical source for developing high-capacity battery architectures.

At a glance

Key Properties

Cross-validated computational properties for Silane, aggregated across 3 databases.

Band Gap

6.56 eV
Range across DFT structures

Energy Above Hull

0.000 eV/atom
Best (lowest) across sources

Stability

On hull (stable)
2 DFT sources

Structures

41
3 databases, 13 space groups
Uses

Applications

Where Silane is used.

Semiconductor manufacturingChemical vapor depositionSilicon-based anode material synthesisPhotovoltaic cell production
Intellectual Property

Patent Landscape

7 patents reference SiH4 or close compositional variants.

PatentTitleAssigneeGranted
4601798Continuous preparation of silane, SiH.sub.4
5997949Synthesis of W-Si-N films by chemical vapor deposition using WF.sub.6, SiH.sub.4 and NH.sub.3
6905963Fabrication of B-doped silicon film by LPCVD method using BCI3 and SiH4 gases
6193813Utilization of SiH4 soak and purge in deposition processes
4499063Preparation of silane, SiH.sub.4
4405591Hydrogenation of chlorosilanes to silane, SiH.sub.4, in bath of molten salts
5817576Utilization of SiH.sub.4 soak and purge in deposition processes
Reference

Frequently Asked Questions

Common questions about Silane, answered from cross-validated data.

What is SiH4?

Silane is a stable, insulating silicon hydride gas widely used as a precursor for depositing high-purity silicon in semiconductor and battery technology.

More questions
What is SiH4 used for?
Silane (SiH4) is used in semiconductor manufacturing, chemical vapor deposition, silicon-based anode material synthesis, and photovoltaic cell production.
What is the band gap of SiH4?
Silane (SiH4) has a DFT-computed band gap of 6.56 eV across 41 reported structures.
Is SiH4 a metal, semiconductor, or insulator?
With a wide band gap up to 6.56 eV it is an insulator / wide-band-gap material.
Is SiH4 thermodynamically stable?
Yes — Silane (SiH4) sits on the convex hull (energy above hull 0 eV/atom), i.e. on hull (stable).
How many polymorphs of SiH4 are known?
41 structures of SiH4 are reported across 3 databases, spanning 13 distinct space groups.
What elements does SiH4 contain?
Silane (SiH4) contains H and Si (2 elements).
Where does the data for SiH4 come from?
SiH4 data is cross-referenced from latticegraph.
Comparison

How It Compares

Within the silicon anode materials class.

While most members of the silicon-based class, such as FeSi, Mg2Si, and MoSi2, exist as dense, metallic or semi-metallic crystalline solids, silane is distinct due to its gaseous state and insulating electronic character. Unlike the structural stability found in elemental silicon or the complex silicides like BaSi2, silane provides a versatile molecular pathway for depositing silicon onto substrates, making it an essential chemical precursor rather than a structural component in battery electrodes.

Explore

Related Compounds

Other Silicon Anode Materials in the database.

Data sources & attribution
  • latticegraph — Lattice Graph Materials Intelligence Platform

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