SiF4
Silicon tetrafluoride · Tetrafluorosilane
Silicon tetrafluoride is a stable, insulating gas used extensively as a precursor in the production of silicon-based electronic materials.
About Silicon tetrafluoride
Silicon tetrafluoride is a thermodynamically stable inorganic compound characterized by its wide-band-gap insulating electronic nature. It plays a critical role in industrial chemistry due to its unique reactivity and volatility, serving as a key precursor in the synthesis of silicon-based thin films and materials.
As a vital component within the broader landscape of silicon-containing materials, this compound is essential for precision etching and deposition techniques. Its stability and chemical properties make it a preferred choice for specialized applications where controlled silicon delivery is required.
Key Properties
Cross-validated computational properties for Silicon tetrafluoride, aggregated across 3 databases.
Band GapEnergy needed to move an electron from the valence band to the conduction band. Lower or zero values tend to behave more metallic; larger gaps are more insulating or semiconducting.
Energy Above HullThermodynamic distance from the most stable set of competing phases. 0 eV/atom is on the convex hull; small positive values may still be experimentally accessible.
StabilityA plain-language summary of the best reported energy-above-hull result. It reflects whether the lowest-energy structure is on, near, or far from the stability hull.
StructuresCount of reported calculated crystal structures for this formula, including alternate polymorphs, source databases, and observed space groups.
Applications
Where Silicon tetrafluoride is used.
Patent Landscape
3 patents reference SiF4 or close compositional variants.
| Patent | Title | Assignee | Granted |
|---|---|---|---|
| 6903031 | In-situ-etch-assisted HDP deposition using SiF4 and hydrogen | — | — |
| 7049211 | In-situ-etch-assisted HDP deposition using SiF4 | — | — |
| 4714604 | Method of separating HF and SiF.sub.4 from HCl | — | — |
Frequently Asked Questions
Common questions about Silicon tetrafluoride, answered from cross-validated data.
What is SiF4?
Silicon tetrafluoride is a stable, insulating gas used extensively as a precursor in the production of silicon-based electronic materials.
What is SiF4 used for?
What is the band gap of SiF4?
Is SiF4 a metal, semiconductor, or insulator?
Is SiF4 thermodynamically stable?
How many polymorphs of SiF4 are known?
What elements does SiF4 contain?
Where does the data for SiF4 come from?
How It Compares
Within the silicon anode materials class.
Unlike metallic or semi-metallic silicon-based compounds such as FeSi or MoSi2, which are often valued for their electrical conductivity or structural robustness, SiF4 stands out as a highly insulating, volatile species. While materials like Si or Mg2Si are primarily studied for their role in energy storage or semiconductor electronics, SiF4 is distinguished by its gaseous nature and utility as a chemical reagent in thin-film fabrication.
Related Compounds
Other Silicon Anode Materials in the database.
Data sources & attribution
- latticegraph — Lattice Graph Materials Intelligence Platform
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