Ta2O5

Tantalum pentoxide · Tantalum(V) oxide

Tantalum pentoxide is a chemically stable, insulating oxide widely used as a high-dielectric material in capacitors and optical coatings.

OTa
Crystal structure of Ta2O5 (monoclinic, C2 (No. 5))
Ground-state structure · Materials Project
Overview

About Tantalum pentoxide

Tantalum pentoxide is a robust and thermodynamically stable binary oxide that serves as a cornerstone material in modern dielectric applications. Its insulating nature and high chemical resistance make it an essential component for thin-film technology and high-performance electronic devices. The material is characterized by its significant structural diversity, with numerous reported configurations that allow engineers to tune its properties for specific technical requirements. Its reliability and stability ensure it remains a preferred choice for demanding environments where consistent dielectric performance is critical.

At a glance

Key Properties

Cross-validated computational properties for Tantalum pentoxide, aggregated across 3 databases.

Band Gap

0.36–3.46 eV
Range across DFT structures · ground state: insulator

Energy Above Hull

0.000 eV/atom
Best (lowest) across sources

Stability

Stable
3 DFT sources

Structures

77
3 databases, 15 space groups
Validation

Cross-Source DFT Agreement

How well independent DFT databases agree on the thermodynamics of Ta2O5. Tight agreement means computed properties can be trusted without re-running calculations.

Agreement Score

1.00 / 1.00
Trust tier: high

Hull Spread

0.000 eV
EAH spread across sources

Sources Compared

3
jarvis, materials_project, oqmd

Space Group Consensus

All match
Crystallography

Reported Structures

Lowest-energy structures reported for Ta2O5, ranked by energy above hull.

Space GroupCrystal SystemBand Gap (eV)E above hull (eV/atom)E/atom (eV)Density (g/cm³)
C2/c (No. 15)monoclinic3.180.0000-3.043—
C2/c (No. 15)monoclinic3.070.0000-10.2718.73
——2.470.0000-3.144—
——2.510.0024-3.141—
——3.210.0134-3.130—
Pmmn (No. 59)orthorhombic2.760.0136-10.2587.56
P2/m (No. 10)monoclinic2.340.0139-10.2577.57
Pmmn (No. 59)orthorhombic2.390.0147-10.2577.62
——1.360.0160-3.128—
Pmmn (No. 59)orthorhombic2.340.0280-3.015—
Cmmm (No. 65)orthorhombic2.220.0282-3.015—
C2/m (No. 12)monoclinic2.240.0419-3.001—
Uses

Applications

Where Tantalum pentoxide is used.

High-k dielectric capacitorsOptical thin-film coatingsMicroelectronic gate insulatorsWaveguide components
Intellectual Property

Patent Landscape

15 patents reference Ta2O5 or close compositional variants.

PatentTitleAssigneeGranted
6863725Method of forming a Ta2O5 comprising layer——
7297646Ceramics comprising Al2O3, REO, ZrO2 and/or HfO2, and Nb2O5 and/or Ta2O5 and methods of making the same——
6537925Method for forming Ta2O5 dielectric layer using plasma enhanced atomic layer deposition——
6958301Method for forming Ta2O5 dielectric layer by using in situ N2O plasma treatment——
12268033Self-powered ultraviolet photodetection performance using Au/Ta2O5/GAN: metal-insulator-semiconductor (MIS) he——
6919283Fabrication of pure and modified Ta2O5 thin film with enhanced properties for microwave communication, dynamic——
6555394Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heat——
9376744Phase-difference element having birefringent film containing TiO2 and Ta2O5——
7141523Ceramics comprising Al2O3, REO, ZrO2 and/or HfO2, and Nb2O5 and/or Ta2O5 and methods of making the same——
11873248Modified NiO-Ta2O5-based microwave dielectric ceramic material sintered at low temperature and its preparation——
Reference

Frequently Asked Questions

Common questions about Tantalum pentoxide, answered from cross-validated data.

What is Ta2O5?

Tantalum pentoxide is a chemically stable, insulating oxide widely used as a high-dielectric material in capacitors and optical coatings.

More questions
What is Ta2O5 used for?
Tantalum pentoxide (Ta2O5) is used in high-k dielectric capacitors, optical thin-film coatings, microelectronic gate insulators, and waveguide components.
What is the band gap of Ta2O5?
Tantalum pentoxide (Ta2O5) has a DFT-computed band gap of 0.36–3.46 eV across 77 reported structures. Standard DFT underestimates band gaps, so the measured gap is typically larger.
Is Ta2O5 a metal, semiconductor, or insulator?
DFT predicts a wide band gap of up to 3.46 eV (an insulator or wide-band-gap material).
Is Ta2O5 thermodynamically stable?
Yes — Tantalum pentoxide (Ta2O5) sits on the convex hull (energy above hull 0 eV/atom), i.e. stable.
What is the crystal structure of Ta2O5?
The reference structure of Tantalum pentoxide (Ta2O5) is monoclinic symmetry, space group C2 (No. 5).
What is the density of Ta2O5?
The computed density of the ground-state structure of Tantalum pentoxide (Ta2O5) is 7.03 g/cm³.
How many polymorphs of Ta2O5 are known?
77 structures of Ta2O5 are reported across 3 databases, spanning 15 distinct space groups.
What elements does Ta2O5 contain?
Tantalum pentoxide (Ta2O5) contains O and Ta (2 elements).
Where does the data for Ta2O5 come from?
Ta2O5 data is cross-referenced from jarvis, materials_project, oqmd.
Comparison

How It Compares

As a standalone binary oxide, tantalum pentoxide represents a benchmark for stability and insulating performance within the broader family of transition metal oxides used in microelectronics.

Data sources & attribution
  • jarvis — Data from JARVIS (jarvis.nist.gov), NIST. Cite: Choudhary et al., npj Comp. Mater. 6, 173 (2020). (LicenseRef-US-Gov-PD)
  • materials_project — Data from the Materials Project (materialsproject.org). Cite: Jain et al., APL Materials 1, 011002 (2013). (CC-BY-4.0)
  • oqmd — Data from the OQMD (oqmd.org). Cite: Saal et al., JOM 65, 1501 (2013); Kirklin et al., npj Comp. Mater. 1, 15010 (2015). (CC-BY-4.0)

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