Ta2O5

Tantalum pentoxide · Tantalum(V) oxide

Tantalum pentoxide is a chemically stable, insulating oxide widely used as a high-dielectric material in capacitors and optical coatings.

OTa
Crystal structure of Ta2O5
Ground-state structure · Materials Project
Overview

About Tantalum pentoxide

Tantalum pentoxide is a robust and thermodynamically stable binary oxide that serves as a cornerstone material in modern dielectric applications. Its insulating nature and high chemical resistance make it an essential component for thin-film technology and high-performance electronic devices. The material is characterized by its significant structural diversity, with numerous reported configurations that allow engineers to tune its properties for specific technical requirements. Its reliability and stability ensure it remains a preferred choice for demanding environments where consistent dielectric performance is critical.

At a glance

Key Properties

Cross-validated computational properties for Tantalum pentoxide, aggregated across 3 databases.

Band Gap

0.26–3.90 eV
Range across DFT structures

Energy Above Hull

0.000 eV/atom
Best (lowest) across sources

Stability

On hull (stable)
2 DFT sources

Structures

94
3 databases, 16 space groups
Uses

Applications

Where Tantalum pentoxide is used.

High-k dielectric capacitorsOptical thin-film coatingsMicroelectronic gate insulatorsWaveguide components
Intellectual Property

Patent Landscape

15 patents reference Ta2O5 or close compositional variants.

PatentTitleAssigneeGranted
6863725Method of forming a Ta2O5 comprising layer
7297646Ceramics comprising Al2O3, REO, ZrO2 and/or HfO2, and Nb2O5 and/or Ta2O5 and methods of making the same
6537925Method for forming Ta2O5 dielectric layer using plasma enhanced atomic layer deposition
6958301Method for forming Ta2O5 dielectric layer by using in situ N2O plasma treatment
12268033Self-powered ultraviolet photodetection performance using Au/Ta2O5/GAN: metal-insulator-semiconductor (MIS) he
6919283Fabrication of pure and modified Ta2O5 thin film with enhanced properties for microwave communication, dynamic
6555394Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heat
9376744Phase-difference element having birefringent film containing TiO2 and Ta2O5
7141523Ceramics comprising Al2O3, REO, ZrO2 and/or HfO2, and Nb2O5 and/or Ta2O5 and methods of making the same
11873248Modified NiO-Ta2O5-based microwave dielectric ceramic material sintered at low temperature and its preparation
Reference

Frequently Asked Questions

Common questions about Tantalum pentoxide, answered from cross-validated data.

What is Ta2O5?

Tantalum pentoxide is a chemically stable, insulating oxide widely used as a high-dielectric material in capacitors and optical coatings.

More questions
What is Ta2O5 used for?
Tantalum pentoxide (Ta2O5) is used in high-k dielectric capacitors, optical thin-film coatings, microelectronic gate insulators, and waveguide components.
What is the band gap of Ta2O5?
Tantalum pentoxide (Ta2O5) has a DFT-computed band gap of 0.26–3.90 eV across 94 reported structures.
Is Ta2O5 a metal, semiconductor, or insulator?
With a wide band gap up to 3.90 eV it is an insulator / wide-band-gap material.
Is Ta2O5 thermodynamically stable?
Yes — Tantalum pentoxide (Ta2O5) sits on the convex hull (energy above hull 0 eV/atom), i.e. on hull (stable).
How many polymorphs of Ta2O5 are known?
94 structures of Ta2O5 are reported across 3 databases, spanning 16 distinct space groups.
What elements does Ta2O5 contain?
Tantalum pentoxide (Ta2O5) contains O and Ta (2 elements).
Where does the data for Ta2O5 come from?
Ta2O5 data is cross-referenced from latticegraph.
Comparison

How It Compares

As a standalone binary oxide, tantalum pentoxide represents a benchmark for stability and insulating performance within the broader family of transition metal oxides used in microelectronics.

Data sources & attribution
  • latticegraph — Lattice Graph Materials Intelligence Platform

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