MoF6

Molybdenum hexafluoride · Molybdenum(VI) fluoride

Molybdenum hexafluoride is a volatile inorganic compound that exists as a colorless solid at room temperature. It is primarily utilized as a chemical precursor in the deposition of metallic molybdenum films for various industrial and electronic applications.

FMo
Crystal structure of MoF6 (orthorhombic, Pnma (No. 62))
Ground-state structure · Materials Project
Overview

Key Properties

Cross-validated computational properties for Molybdenum hexafluoride, aggregated across 3 databases.

Band Gap

4.17–4.24 eV
Range across DFT structures

Energy Above Hull

0.000 eV/atom
Best (lowest) across sources

Stability

On hull (stable)
2 DFT sources

Structures

21
3 databases, 8 space groups
Crystallography

Reported Structures

Lowest-energy structures reported for MoF6, ranked by energy above hull.

Space GroupCrystal SystemBand Gap (eV)E above hull (eV/atom)E/atom (eV)Density (g/cm³)
Pnma (No. 62)orthorhombic4.170.0000-9.0403.56
Im-3m (No. 229)cubic4.240.0304-9.0102.74
Im-3m (No. 229)Cubic2.55
P31m (No. 157)Trigonal4.80
P31m (No. 157)Trigonal4.33
P31m (No. 157)Trigonal6.22
P2/m (No. 10)Monoclinic3.15
P2/m (No. 10)Monoclinic2.61
Pnma (No. 62)Orthorhombic2.95
Im-3m (No. 229)Cubic2.72
Pnma (No. 62)Orthorhombic3.26
Cm (No. 8)Monoclinic5.44
Uses

Applications

Where Molybdenum hexafluoride is used.

Chemical vapor depositionSemiconductor manufacturingSurface coating processes
Reference

Frequently Asked Questions

Common questions about Molybdenum hexafluoride, answered from cross-validated data.

What is MoF6?

Molybdenum hexafluoride is a volatile inorganic compound that exists as a colorless solid at room temperature. It is primarily utilized as a chemical precursor in the deposition of metallic molybdenum films for various industrial and electronic applications.

More questions
What is MoF6 used for?
Molybdenum hexafluoride (MoF6) is used in chemical vapor deposition, semiconductor manufacturing, and surface coating processes.
What is the band gap of MoF6?
Molybdenum hexafluoride (MoF6) has a DFT-computed band gap of 4.17–4.24 eV across 21 reported structures.
Is MoF6 a metal, semiconductor, or insulator?
With a wide band gap up to 4.24 eV it is an insulator / wide-band-gap material.
Is MoF6 thermodynamically stable?
Yes — Molybdenum hexafluoride (MoF6) sits on the convex hull (energy above hull 0 eV/atom), i.e. on hull (stable).
What is the crystal structure of MoF6?
The lowest-energy reported polymorph of Molybdenum hexafluoride (MoF6) is orthorhombic symmetry, space group Pnma (No. 62).
What is the density of MoF6?
The computed density of the ground-state structure of Molybdenum hexafluoride (MoF6) is 3.56 g/cm³.
How many polymorphs of MoF6 are known?
21 structures of MoF6 are reported across 3 databases, spanning 8 distinct space groups.
What elements does MoF6 contain?
Molybdenum hexafluoride (MoF6) contains F and Mo (2 elements).
Where does the data for MoF6 come from?
MoF6 data is cross-referenced from materials_project, mpaloe, jarvis.
Data sources & attribution
  • materials_project — Data from the Materials Project. Cite: Jain et al., APL Materials 1, 011002 (2013).
  • mpaloe — Data from mpaloe.
  • jarvis — Data from JARVIS (NIST). Cite: Choudhary et al., npj Comp. Mater. 6, 173 (2020).

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