TiW

TiW is a metallic titanium-tungsten alloy frequently used as a diffusion barrier in semiconductor manufacturing.

TiW
Crystal structure of TiW
Ground-state structure · Materials Project
Overview

About TiW

TiW is a metallic binary alloy composed of titanium and tungsten. It is recognized for its robust structural integrity and is considered highly synthesizable due to its position near the thermodynamic hull, making it a reliable candidate for material engineering tasks. Its metallic nature ensures high electrical conductivity, which is critical for its performance in demanding technical environments. The compound is widely utilized in the semiconductor industry, particularly as a diffusion barrier layer that prevents the intermixing of metals in integrated circuits. Its ability to maintain stability under various processing conditions makes it a staple in microelectronics manufacturing.

At a glance

Key Properties

Cross-validated computational properties for TiW, aggregated across 4 databases.

Band Gap

Metallic / not reported

Energy Above Hull

0.023 eV/atom
Best (lowest) across sources

Stability

Near hull (likely stable)
2 DFT sources

Structures

267
4 databases, 30 space groups
Validation

Cross-Source DFT Agreement

How well independent DFT databases agree on the thermodynamics of TiW. Tight agreement means computed properties can be trusted without re-running calculations.

Agreement Score

1.00 / 1.00
Trust tier: medium

Hull Spread

0.000 eV
EAH spread across sources

Sources Compared

2
jarvis, materials_project

Space Group Consensus

All match
Synthesis

Synthesis Routes

Literature-extracted synthesis procedures targeting TiW.

Sol Gel
Procedure available · ceder_sol_gel
Sol Gel
Procedure available · ceder_sol_gel
Sol Gel
Procedure available · ceder_sol_gel
Solid State
Procedure available · ceder_solid_state
Solid State
Procedure available · ceder_solid_state
Solid State
Procedure available · ceder_solid_state
Uses

Applications

Where TiW is used.

Diffusion barriers in integrated circuitsAdhesion promotion in thin-film metallizationMicroelectronic contact layers
Intellectual Property

Patent Landscape

5 patents reference TiW or close compositional variants.

PatentTitleAssigneeGranted
5462638Selective etching of TiW for C4 fabrication
4787958Method of chemically etching TiW and/or TiWN
6855638Process to pattern thick TiW metal layers using uniform and selective etching
8025812Selective etch of TiW for capture pad formation
5290588TiW barrier metal process
Reference

Frequently Asked Questions

Common questions about TiW, answered from cross-validated data.

What is TiW?

TiW is a metallic titanium-tungsten alloy frequently used as a diffusion barrier in semiconductor manufacturing.

More questions
What is TiW used for?
TiW is used in diffusion barriers in integrated circuits, adhesion promotion in thin-film metallization, and microelectronic contact layers.
What is the band gap of TiW?
TiW is computed to be metallic (no band gap) in the reported DFT structures.
Is TiW a metal, semiconductor, or insulator?
Computed band structures report no gap, so it is metallic.
Is TiW thermodynamically stable?
TiW has a lowest energy above hull of 0.023 eV/atom (near hull (likely stable)).
How many polymorphs of TiW are known?
267 structures of TiW are reported across 4 databases, spanning 30 distinct space groups.
How is TiW synthesized?
Literature-reported routes for TiW include sol gel, solid state (10 procedures documented).
What elements does TiW contain?
TiW contains Ti and W (2 elements).
Where does the data for TiW come from?
TiW data is cross-referenced from latticegraph.
Comparison

How It Compares

As a binary alloy, TiW serves as a foundational material in its class, often favored for its specific balance of mechanical hardness and chemical resistance. It acts as a critical interface material, providing superior adhesion and barrier properties that are essential for the reliability of modern electronic devices.

Data sources & attribution
  • latticegraph — Lattice Graph Materials Intelligence Platform

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